USHIO INC., has introduced a powerful stepper For high-volume production of 2.5D/3D interposers.

In the dynamic to improve its services and products, USHIO, has taken a new turn. Henceforth, the company has booked the large-field stepper “UX7-3Di LIS 350” for manufacturing
interposers used for 2.5D/3D packaging applications.

The goal is to deliver the first unit to a leading advanced-packaging manufacturer by the end of July 2013.

For those who unfamiliar, the UX7-3Di LIS 350, billed as the latest model of the UX7-3Di interposer stepper series, has achieved an industry-leading resolution of 2 µm L/S on a 300-mm Si wafer as well as an organic substrate.

Connectikpeople has also learned that, the UX7-3Di LIS 350 is able to address a warp or expansion/contraction of an organic substrate, thus being optimized for manufacturing 2.5D/3D interposers made of organic substrates that have recently become popular, other than Si wafers and in order to meet the further need for finer circuit patterns, USHIO is currently developing a large-field precision projection lens that can produce a super-high resolution of 1 µm L/S.

According to Masayuki Itaba, General Manager of the Exposure Business Unit, USHIO INC,

“For high-volume production of 2.5D/3D interposers, we have introduced a stepper capable of processing not only Si wafers but also square substrates including glass and organic substrates. Utilizing this UX7-3Di LIS 350 stepper allows significant reduction of the interposer manufacturing cost, which ultimately leads to reduction of the manufacturing cost of final products such as smart phones and tablet PCs,”

About USHIO INC.

Established in 1964, USHIO INC. (TOKYO: 6925) is a leading manufacturer of light sources such as lamps, lasers, and LEDs, in a broad range from ultraviolet to visible to infrared rays, as well as optical equipment and cinema-related products that incorporate these light sources. It also makes products in the electronics field, such as semiconductors, flat panel displays and electronic components, and in the visual imaging field, including digital projectors and lighting.